The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2010
Filed:
Feb. 28, 2005
Erez Sali, Savion, IL;
Tomer Yanir, Yehud, IL;
Mark Wagner, Rehovot, IL;
Noam Dotan, Givatayim, IL;
Yuval Dorfan, Ra'anana, IL;
Ran Zaslavsky, Kfar Saba, IL;
Erez Sali, Savion, IL;
Tomer Yanir, Yehud, IL;
Mark Wagner, Rehovot, IL;
Noam Dotan, Givatayim, IL;
Yuval Dorfan, Ra'anana, IL;
Ran Zaslavsky, Kfar Saba, IL;
Applied Materials South East Asia Pte. Ltd., Singapore, SG;
Abstract
A method for inspecting a wafer including a multiplicity of dies, the method including dividing an image of at least a portion of the wafer into a plurality of sub-images each representing a sub-portion of the wafer and selecting at least one defect candidate within each sub-image by comparing each sub-image to a corresponding sub-image of a reference including a representation, which is assumed to be faultless, of the portion of the wafer.