The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2010
Filed:
Jun. 11, 2008
Applicants:
Peter Kurunczi, Cambridge, MA (US);
Rajesh Dorai, Woburn, MA (US);
Costel Biloiu, Rockport, MA (US);
Wilhelm Platow, Somerville, MA (US);
Inventors:
Peter Kurunczi, Cambridge, MA (US);
Rajesh Dorai, Woburn, MA (US);
Costel Biloiu, Rockport, MA (US);
Wilhelm Platow, Somerville, MA (US);
Assignee:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 27/00 (2006.01); H01J 27/24 (2006.01); H01T 23/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation comprising an ion source that operates in multiple modes such that a first mode is an arc-discharge mode and a second mode is an RF mode.