The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2010
Filed:
Jul. 03, 2002
Chih-hung Huang, Mil-Lie, TW;
Ching-chiang Chang, Hsin-Chu, TW;
Yu-yen Chang, Taipei, TW;
Pei-yi Kuo, Tainan, TW;
Kuo-chen Lin, Hsing-Chu, TW;
Chung-yi Lee, Tainan, TW;
Chih-Hung Huang, Mil-Lie, TW;
Ching-Chiang Chang, Hsin-Chu, TW;
Yu-Yen Chang, Taipei, TW;
Pei-Yi Kuo, Tainan, TW;
Kuo-Chen Lin, Hsing-Chu, TW;
Chung-Yi Lee, Tainan, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
A platform for securely mounting a wafer cassette holder thereon is provided which includes a wafer cassette holder that has a flat bottom surface and four sidewall panels, a platform that has a flat top surface larger than and for mating to the flat bottom surface of the wafer cassette holder, And a securing device mounted in the flat top surface of the platform juxtaposed to each side of the four sidewalls of the wafer cassette holder for preventing the holder from accidentally slipping off the platform, the securing device may include either a plurality of engagement pins that slidingly engages the wafer cassette holder for securely holding the holder on the platform, or a plurality of side panels mounted along the peripheral edge of the platform for preventing the holder from slipping off the platform.