The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7810066 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 05, 2010

Filed:

Oct. 03, 2007
Applicant:

Tadao Yasuzato, Chuo-ku, JP;

Inventor:

Tadao Yasuzato, Chuo-ku, JP;

Assignee:

Elpida Memory, Inc., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
Abstract

An irradiation pattern data generation method includes: a process for providing a design pattern having diagonal side portions that extend diagonally with respect to an X-axis direction and a Y-axis direction on an XY plane; a rectangular approximation process for approximating the design pattern to rectangles to generate a rectangular approximation pattern; a first correction process for shifting the side portions of the rectangular approximation pattern in the Y-axis direction to generate a first correction pattern; and a second correction process for enlarging the side portions of the first correction pattern in the X-axis direction and the Y-axis direction to generate an irradiation pattern.


Find Patent Forward Citations

Yasuzato, Tadao. (2010). Irradiation pattern data generation method, mask fabrication method, and plotting system (U.S. Patent No. 7810066). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7810066

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