The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2010
Filed:
Sep. 26, 2006
Applicants:
Tsukasa Iida, Toyama, JP;
Akihiko Yoneda, Toyama, JP;
Kaori Inoshima, Toyama, JP;
Inventors:
Assignee:
Hitachi Kokusai Electric, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G08B 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
It is intended to provide a substrate processing apparatus capable of reliably informing a running state of the apparatus. The substrate processing apparatushaving a signal indicator for indicating the running state, including a signal indicatorcapable of setting at least one operation condition under which the signal indicatoroperates as well as of operating under any one of a plurality of operation conditions and a display unitcapable of displaying that a cause of the operation is any one of the operation conditions during the operation of the signal indicator