The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2010
Filed:
Feb. 12, 2004
Junji Ando, Aichi, JP;
Naoyuki Sakai, Aichi, JP;
Toshiyuki Saito, Aichi, JP;
Kazuyuki Nakanishi, Aichi, JP;
Hiroyuki Mori, Aichi, JP;
Hideo Tachikawa, Aichi, JP;
Kyouji Itou, Aichi, JP;
Mikio Fujioka, Aichi, JP;
Yoshiyuki Funaki, Tokyo, JP;
Junji Ando, Aichi, JP;
Naoyuki Sakai, Aichi, JP;
Toshiyuki Saito, Aichi, JP;
Kazuyuki Nakanishi, Aichi, JP;
Hiroyuki Mori, Aichi, JP;
Hideo Tachikawa, Aichi, JP;
Kyouji Itou, Aichi, JP;
Mikio Fujioka, Aichi, JP;
Yoshiyuki Funaki, Tokyo, JP;
JTEKT Corporation, Osaka, JP;
Abstract
An amorphous carbon film forming apparatus according to the present invention is characterized by being provided with a film forming furnace; plural workpiece fixturesfor supporting plural plate-like workpiecesin a state that the same are piled up vertically in parallel with the interval between facing surfaces of two vertically adjoining of the plate-like workpiecesbeing in a range of 2 to 30 millimeters, the plural workpiece fixturesbeing arranged within the film forming furnaceat a regular angular interval on a circle and being connected to a negative electrode; nozzlesprovided for supplying a processing gas and including at least one nozzle arranged at a center of the circle on which the plural workpiece fixturesare arranged and plural nozzles arranged at a regular angular interval on another circle which surrounds the workpieces fixturesradially outside thereof; and a plasma power supply connected to at least the workpiece fixtures. By controlling the supply gas pressure to be in a range of 13 to 1,330 Pa and a sheath width to be made in a range of 2 to 30 mm, the discharge is kept stably. As a consequence, it can be realized to form amorphous carbon films efficiently at a low cost.