The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Aug. 19, 2008
Benyamin Buller, Cupertino, CA (US);
William J. Devore, Hayward, CA (US);
Juergen Frosien, Riemerling, D-85521, DE;
Xinrong Jiang, Palo Alto, CA (US);
Richard L. Lozes, Pleasanton, CA (US);
Henry Thomas Pearce-percy, Los Gatos, CA (US);
Dieter Winkler, Munich, D-81737, DE;
Steven T. Coyle, Alameda, CA (US);
Helmut Banzhof, 85596 Poing, DE;
Benyamin Buller, Cupertino, CA (US);
William J. DeVore, Hayward, CA (US);
Juergen Frosien, Riemerling, D-85521, DE;
Xinrong Jiang, Palo Alto, CA (US);
Richard L. Lozes, Pleasanton, CA (US);
Henry Thomas Pearce-Percy, Los Gatos, CA (US);
Dieter Winkler, Munich, D-81737, DE;
Steven T. Coyle, Alameda, CA (US);
Helmut Banzhof, 85596 Poing, DE;
Other;
Abstract
A multifunction module for an electron beam column comprises upper and lower electrodes, and a central ring electrode. The upper and lower electrodes have multipoles and are capable of deflecting, or correcting an aberration of, an electron beam passing through the electrodes. A voltage can be applied to the central ring electrode independently of the voltages applied to the upper and lower electrodes to focus the electron beam on a substrate.