The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Aug. 06, 2004
Alex Goldenshtein, Rishon LeZion, IL;
Radel Ben-av, Rehovot, IL;
Asher Pearl, Kadima, IL;
Igor Petrov, Holon, IL;
Nadav Haas, Merkaz-Shapira, IL;
Pavel Adamec, Haar, DE;
Yaron Gold, Zicron-Yaacou, IL;
Alex Goldenshtein, Rishon LeZion, IL;
Radel Ben-Av, Rehovot, IL;
Asher Pearl, Kadima, IL;
Igor Petrov, Holon, IL;
Nadav Haas, Merkaz-Shapira, IL;
Pavel Adamec, Haar, DE;
Yaron Gold, Zicron-Yaacou, IL;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.