The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Feb. 18, 2003
Wolfram Maass, Linsengericht/Grossenhausen, DE;
Roland Schneider, Schotten-Michelbach, DE;
Uwe Mühlfeld, Wörth, DE;
Christoph Mundorf, Kahl, DE;
Berthold Ocker, Hanau, DE;
Jürgen Langer, Offenbach, DE;
Dietmer Schneider, Schöneck, DE;
Helmut John, Hanau, DE;
Rudi Spielvogel, Wächtersbach, DE;
Eric Claussen, Hanau, DE;
Wolfgang Stern, Hanau, DE;
Helmut Lausmann, Gründau, DE;
Matthias Landmann, Mainaschaff, DE;
Reinhard Sommerfeld, Bruchköbel-Rossdorf, DE;
Wolfram Maass, Linsengericht/Grossenhausen, DE;
Roland Schneider, Schotten-Michelbach, DE;
Uwe Mühlfeld, Wörth, DE;
Christoph Mundorf, Kahl, DE;
Berthold Ocker, Hanau, DE;
Jürgen Langer, Offenbach, DE;
Dietmer Schneider, Schöneck, DE;
Helmut John, Hanau, DE;
Rudi Spielvogel, Wächtersbach, DE;
Eric Claussen, Hanau, DE;
Wolfgang Stern, Hanau, DE;
Helmut Lausmann, Gründau, DE;
Matthias Landmann, Mainaschaff, DE;
Reinhard Sommerfeld, Bruchköbel-Rossdorf, DE;
Singulus Technologies AG, Kahl/Main, DE;
Abstract
The invention relates to a sputtering cathode () for coating a substrate (), which comprises a device () for generating an external magnetic field with substantially parallel magnetic field lines () substantially in the plane of the substrate. The invention further relates to a device and a method for coating a substrate with several layers, whereby several sputtering cathodes are disposed in a circle with their target effective areas pointing radially outward.