The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Dec. 20, 2004
Makoto Namikawa, Ibaraki, JP;
Yoshio Terada, Ibaraki, JP;
Jirou Nukaga, Ibaraki, JP;
Eiji Toyoda, Ibaraki, JP;
Hirofumi Fujii, Ibaraki, JP;
Daisuke Uenda, Ibaraki, JP;
Asami Funatsu, Ibaraki, JP;
Nobuaki Maruoka, Ibaraki, JP;
Hitoshi Ishizaka, Ibaraki, JP;
Yasuhiro Amano, Ibaraki, JP;
Makoto Namikawa, Ibaraki, JP;
Yoshio Terada, Ibaraki, JP;
Jirou Nukaga, Ibaraki, JP;
Eiji Toyoda, Ibaraki, JP;
Hirofumi Fujii, Ibaraki, JP;
Daisuke Uenda, Ibaraki, JP;
Asami Funatsu, Ibaraki, JP;
Nobuaki Maruoka, Ibaraki, JP;
Hitoshi Ishizaka, Ibaraki, JP;
Yasuhiro Amano, Ibaraki, JP;
Nitto Denko Corporation, Osaka, JP;
Abstract
A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mmas determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.