The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2010
Filed:
Jan. 28, 2008
Applicant:
Mitsuhiro Horikawa, Tokyo, JP;
Inventor:
Mitsuhiro Horikawa, Tokyo, JP;
Assignee:
Elpida Memory, Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/469 (2006.01); H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device includes: a semiconductor substrate; a memory cell selection transistor that is formed on the semiconductor substrate and has a source and a drain; a contact plug; a polysilicon interlayer film that is formed above the memory cell selection transistor and has a cylinder-shaped through-hole; and a storage capacity part that is formed in the through-hole and is connected to the source and the drain of the memory cell selection transistor via the contact plug, wherein a boundary between a bottom and a side wall of the through-hole has a curved surface.