The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2010
Filed:
May. 27, 2005
Applicants:
Shigeki Nojima, Yokohama, JP;
Satoshi Tanaka, Kawasaki, JP;
Toshiya Kotani, Machida, JP;
Kyoko Izuha, Yokohama, JP;
Soichi Inoue, Yokohama, JP;
Inventors:
Shigeki Nojima, Yokohama, JP;
Satoshi Tanaka, Kawasaki, JP;
Toshiya Kotani, Machida, JP;
Kyoko Izuha, Yokohama, JP;
Soichi Inoue, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
A pattern data correction method is disclosed, which comprises preparing an integrated circuit pattern, setting a tolerance to the pattern that is allowable error range when the pattern is transferred on a substrate, creating a target pattern within the tolerance, and making correction for the target pattern to make a first correction pattern under a predetermined condition.