The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2010
Filed:
May. 09, 2006
Nyles W. Cody, Tempe, AZ (US);
Chantal Arena, Mesa, AZ (US);
Pierre Tomasini, Tempe, AZ (US);
Carlos Mazure, Bernjn, FR;
Nyles W. Cody, Tempe, AZ (US);
Chantal Arena, Mesa, AZ (US);
Pierre Tomasini, Tempe, AZ (US);
Carlos Mazure, Bernjn, FR;
ASM America, Inc., Phoenix, AZ (US);
S.O.I. Tec Silicon on Insulator Technologies, S.A., Bernin, FR;
Abstract
Pile ups of threading dislocations in thick graded buffer layer are reduced by enhancing dislocation gliding. During formation of a graded SiGe buffer layer, deposition of SiGe from a silicon precursor and a germanium precursor is interrupted one or more times with periods in which the flow of the silicon precursor to the substrate is stopped while the flow of the germanium precursor to the substrate is maintained.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile