The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 2010
Filed:
Feb. 20, 2009
Pawan Kumar Nimmakayala, Austin, TX (US);
Byung-jin Choi, Austin, TX (US);
Tom H. Rafferty, Austin, TX (US);
Philip D. Schumaker, Austin, TX (US);
Pawan Kumar Nimmakayala, Austin, TX (US);
Byung-Jin Choi, Austin, TX (US);
Tom H. Rafferty, Austin, TX (US);
Philip D. Schumaker, Austin, TX (US);
Molecular Imprints, Inc., Austin, TX (US);
Abstract
An imprint lithography system operable for imprinting a pattern into a material deposited between an imprint mold and a substrate, the system including, inter alia, a first set of imaging units positioned at a first angle relative to normal of the substrate; and a second set of imaging units positioned at a second angle relative to normal of the substrate, wherein the first and second angles are not equal to each other.