The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Oct. 12, 2006
Hong Qiu, Union City, CA (US);
Junwei Bao, Palo Alto, CA (US);
Wei Liu, Santa Clara, CA (US);
Jeffrey Alexander Chard, Sunnyvale, CA (US);
Miao Liu, Mountain View, CA (US);
Gang He, Sunnyvale, CA (US);
Hemalatha Erva, Fremont, CA (US);
Vi Vuong, Fremont, CA (US);
Hong Qiu, Union City, CA (US);
Junwei Bao, Palo Alto, CA (US);
Wei Liu, Santa Clara, CA (US);
Jeffrey Alexander Chard, Sunnyvale, CA (US);
Miao Liu, Mountain View, CA (US);
Gang He, Sunnyvale, CA (US);
Hemalatha Erva, Fremont, CA (US);
Vi Vuong, Fremont, CA (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
To manage data flow in generating profile models for use in optical metrology, a project data object is created. A first profile model data object is created. The first profile model data object corresponds to a first profile model defined using profile parameters. A version number is associated with the first profile model data object. The first profile model data object is linked with the project data object. At least a second profile model data object is created. The second profile model data object corresponds to a second profile model defined using profile parameters. The first and second profile models are different. Another version number is associated with the second profile model data object. The second profile model data object is linked with the project data object. The project data object, the first profile model data object, and the second profile model data object are stored. The version numbers associated with the first profile model data object and the second profile model data object are stored. The link between the first profile model data object and the project data object is stored. The link between the second profile model data object and the project data object is stored.