The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Aug. 31, 2007
Courosh Mehanian, Seattle, WA (US);
Hans J. Hansen, Pleasanton, CA (US);
Yingjian Wang, Fremont, CA (US);
Yuval Ben-dov, Cambridge, MA (US);
Zheng-wu LI, Milpitas, CA (US);
Andrew V. Hill, San Jose, CA (US);
Mehdi Vaez-iravani, Los Gatos, CA (US);
Kurt Zimmermann, San Jose, CA (US);
Courosh Mehanian, Seattle, WA (US);
Hans J. Hansen, Pleasanton, CA (US);
Yingjian Wang, Fremont, CA (US);
Yuval Ben-Dov, Cambridge, MA (US);
Zheng-Wu Li, Milpitas, CA (US);
Andrew V. Hill, San Jose, CA (US);
Mehdi Vaez-Iravani, Los Gatos, CA (US);
Kurt Zimmermann, San Jose, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
A system is provided herein for inspecting a specimen. In one embodiment, the system may include a dual-channel microscope, two illuminators, each coupled for illuminating a different channel of the dual-channel microscope and two detectors, each coupled to a different channel of the dual-channel microscope for acquiring images of the specimen. Means are provided for separating the channels of the dual-channel microscope, so that the two detectors can acquire the images of the specimen at substantially the same time. In one embodiment, the channels of the dual-channel microscope may be spectrally separated by configuring the two illuminators, so that they produce light in two substantially non-overlapping spectral ranges. In another embodiment, the channels of the dual-channel microscope may be spatially separated by positioning the two detectors, so that the illumination light do not overlap and the fields of view of the two detectors do not overlap within a field of view of an objective lens included within the system.