The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 24, 2010
Filed:
Jun. 08, 2005
Gert-jan Heerens, Schoonhoven, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Jacob Fredrik Frisco Klinkhamer, Delft, NL;
Bastiaan Lambertus Wilhelmus Marinus Van DE Ven, Rosmalen, NL;
Hubert Adriaan Van Mierlo, Maassluis, NL;
Willem Arthur Vliegenthart, Bunnik, NL;
Gert-Jan Heerens, Schoonhoven, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Jacob Fredrik Frisco Klinkhamer, Delft, NL;
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Rosmalen, NL;
Hubert Adriaan Van Mierlo, Maassluis, NL;
Willem Arthur Vliegenthart, Bunnik, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus includes a first support structure configured to support an element that has an alignment marker provided with at least one height difference. The apparatus also includes an alignment sensor comprising a light source that is configured to provide a light beam that illuminates the alignment marker; and at least one detector configured to detect the at least one height difference of the alignment marker by analyzing the light beam reflected by the alignment marker. Such an apparatus may be used to align of the element with respect to the first support structure.