The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 2010
Filed:
Nov. 20, 2008
Junichi Hagihara, Nirasaki, JP;
Junichi Hagihara, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An inspection apparatus includes a movable mounting table for mounting thereon a target object, a probe card disposed above the mounting table and a control unit for controlling the mounting table. The target object is inspected by bringing a plurality of electrode pads of the target object mounted on the mounting table into contact with a plurality of probes of the probe card with a predetermined contact load by overdriving the mounting table. Further, the mounting table includes a mounting body whose temperature is controllable, a support body for supporting the mounting body, an elevation driving mechanism provided in the support body and pressure sensors provided between the mounting body and the support body to thereby detect the contact load. The control unit controls the elevation driving mechanism in accordance with detection signals from the pressure sensors.