The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Dec. 22, 2006
Vadim Yevgenyevich Banine, Helmond, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Konstantin Nikolaevich Koshelev, Troitsk, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
Vadim Yevgenyevich Banine, Helmond, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Konstantin Nikolaevich Koshelev, Troitsk, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An assembly is provided for blocking a beam of radiation. The assembly has a pipe arranged to transmit at least part of the beam of radiation. The pipe has an inner surface provided with an ablation material and encloses a volume. The assembly further has an ablation generation device. The ablation generation device is arranged to ablate at least a portion of the ablation material upon reception of a blocking signal. The assembly has a control unit, which is arranged to control the ablation generation device.