The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 03, 2010
Filed:
Aug. 02, 2007
Craig Prater, Goleta, CA (US);
Chanmin Su, Ventura, CA (US);
Nghi Phan, Santa Barbara, CA (US);
Jeffrey M. Markakis, Santa Barbara, CA (US);
Craig Cusworth, Redding, CA (US);
Jian Shi, Goleta, CA (US);
Johannes H. Kindt, Santa Barbara, CA (US);
Steven F. Nagle, Santa Barbara, CA (US);
Wenjun Fan, Oxnard, CA (US);
Craig Prater, Goleta, CA (US);
Chanmin Su, Ventura, CA (US);
Nghi Phan, Santa Barbara, CA (US);
Jeffrey M. Markakis, Santa Barbara, CA (US);
Craig Cusworth, Redding, CA (US);
Jian Shi, Goleta, CA (US);
Johannes H. Kindt, Santa Barbara, CA (US);
Steven F. Nagle, Santa Barbara, CA (US);
Wenjun Fan, Oxnard, CA (US);
Veeco Instruments, Inc., Plainview, NY (US);
Abstract
A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.