The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 03, 2010

Filed:

May. 11, 2005
Applicants:

Gurtej S. Sandhu, Boise, ID (US);

Randal W. Chance, Boise, ID (US);

Inventors:

Gurtej S. Sandhu, Boise, ID (US);

Randal W. Chance, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 33/055 (2006.01); B29C 59/00 (2006.01); H01L 27/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention comprises methods of patterning a plurality of substrates, and imprint templates used in imprint lithography. In one implementation, a method of patterning a plurality of substrates includes providing an imprint template having a plurality of spaced features. A first substrate is imprinted with the imprint template effective to form a plurality of recesses into the first substrate from the spaced features. After imprinting the first substrate, an elevationally outermost portion of the spaced features is removed effective to reduce elevation of the spaced features. After the removing, a second substrate is imprinted with the imprint template using the elevation-reduced spaced features effective to form a plurality of recesses into the second substrate from the elevation-reduced spaced features. Other aspects and implementations are contemplated.


Find Patent Forward Citations

Sandhu, Gurtej. (2010). Imprint templates for imprint lithography, and methods of patterning a plurality of substrates (U.S. Patent No. 7767129). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7767129

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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