The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2010
Filed:
Oct. 12, 2006
Hong Qiu, Union City, CA (US);
Junwei Bao, Palo Alto, CA (US);
Wei Liu, Santa Clara, CA (US);
Jeffrey Alexander Chard, Sunnyvale, CA (US);
Miao Liu, Mountain View, CA (US);
Gang He, Sunnyvale, CA (US);
Hemalatha Erva, Fremont, CA (US);
Vi Vuong, Fremont, CA (US);
Hong Qiu, Union City, CA (US);
Junwei Bao, Palo Alto, CA (US);
Wei Liu, Santa Clara, CA (US);
Jeffrey Alexander Chard, Sunnyvale, CA (US);
Miao Liu, Mountain View, CA (US);
Gang He, Sunnyvale, CA (US);
Hemalatha Erva, Fremont, CA (US);
Vi Vuong, Fremont, CA (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
To manage data flow in generating different signal formats for use in optical metrology, a project data object is created. A first option data object is created. The first option data object has a set of signal parameters. Different settings of the set of signal parameters correspond to different signal formats for diffraction signals. A version number is associated with the first option data object. The first option data object is linked with the project data object. At least a second option data object is created. The second option data object has a set of signal parameters. Different settings of the set of signal parameters correspond to different signal formats for diffraction signals. The set of signal parameters of the first option data object and the set of signal parameters of the second option data object are set differently. Another version number is associated with the second option data object. The second option data object is linked with the project data object. The project data object, the first option data object, and the second option data object are stored. The version numbers associated with the first option data object and the second option data object are stored. The link between the first option data object and the project data object is stored. The link between the second option data object and the project data object is stored.