The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 27, 2010

Filed:

Apr. 18, 2007
Applicants:

Chih-hao Wang, Hsinchu, TW;

Shang-chih Chen, Hsinchu, TW;

Inventors:

Chih-Hao Wang, Hsinchu, TW;

Shang-Chih Chen, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/119 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device pair is provided. The semiconductor device pair comprises a semiconductor substrate comprising a first gate structure with a first type polarity and a second gate structure with a second type polarity, the first and the second gate structures comprise a high-K gate dielectric. A plurality of oxygen-free offset spacer portions are adjacent either side of the respective first and second gate structures, each comprising a stressed dielectric layer, to induce a desired strain on a respective channel region while sealing respective high-K gate dielectric sidewall portions, wherein the oxygen-free offset spacer portions adjacent either side of the first gate structure and the oxygen-free offset spacer portions adjacent either side of the second gate structure are formed with different shapes.


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