The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
Nov. 19, 2007
Matthias Manger, Aalen-Unterkochen, DE;
Markus Goeppert, Aalen, DE;
Gordon Doering, Hamburg, DE;
Alfred Gatzweiler, Koenigsbronn, DE;
Matthias Manger, Aalen-Unterkochen, DE;
Markus Goeppert, Aalen, DE;
Gordon Doering, Hamburg, DE;
Alfred Gatzweiler, Koenigsbronn, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A method and an apparatus for determining at least one optical property of an imaging optical system which is designed to image an object disposed in an object plane of the optical system into an assigned image plane. The method includes disposing at least one test structure in the object plane of the optical system, disposing an image recording device in at least two different positions relative to the image plane of the optical system, in each of the at least two relative positions the image recording device being offset in relation to the image plane to such an extent that an image of the pupil of the optical system is produced respectively on the image recording device by the optical system by means of the test structure, and recording an image produced on the image recording device by the optical system by means of the test structure in each of the at least two relative positions by means of the image recording device.