The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 2010
Filed:
Mar. 31, 2006
Hans-jürgen Scherle, Aalen, DE;
Yim-bun Patrick Kwan, Aalen, DE;
Stefan Xalter, Oberkochen, DE;
Johannes Lippert, Buch Am Wald, DE;
Ulrich Weber, Ulm, DE;
Bernhard Geuppert, Lauchheim, DE;
Bernhard Gellrich, Aalen, DE;
Jens Kugler, Heubach, DE;
Franz Sorg, Oberkochen, DE;
Willi Heintel, Aalen, DE;
Harald Kirchner, München, DE;
Wolfgang Keller, Erbach, DE;
Andreas Frommeyer, Aalen, DE;
Fraser G. Morrison, Trinity Edingburgh, GB;
Hans-Jürgen Scherle, Aalen, DE;
Yim-Bun Patrick Kwan, Aalen, DE;
Stefan Xalter, Oberkochen, DE;
Johannes Lippert, Buch Am Wald, DE;
Ulrich Weber, Ulm, DE;
Bernhard Geuppert, Lauchheim, DE;
Bernhard Gellrich, Aalen, DE;
Jens Kugler, Heubach, DE;
Franz Sorg, Oberkochen, DE;
Willi Heintel, Aalen, DE;
Harald Kirchner, München, DE;
Wolfgang Keller, Erbach, DE;
Andreas Frommeyer, Aalen, DE;
Fraser G. Morrison, Trinity Edingburgh, GB;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.