The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
Mar. 02, 2005
Katsuya Okumura, Tokyo, JP;
Shigekazu Komatsu, Nirasaki, JP;
Yuichi Abe, Fuchu, JP;
Kunihiro Furuya, Nirasaki, JP;
Vincent Vezin, Nirasaki, JP;
Kenichi Kubo, Nirasaki, JP;
Katsuya Okumura, Tokyo, JP;
Shigekazu Komatsu, Nirasaki, JP;
Yuichi Abe, Fuchu, JP;
Kunihiro Furuya, Nirasaki, JP;
Vincent Vezin, Nirasaki, JP;
Kenichi Kubo, Nirasaki, JP;
Octec Inc., Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A probe method of this invention includes a step of reducing an electrode of a wafer by using a forming gas, and a step of bringing the electrode and a probe pin into contact with each other in a dry atmosphere. The probe method further includes, prior to a reducing process of an electrode of the object to be tested, placing the object to be tested in an inert gas atmosphere and heating the object to be tested. The reducing process is performed by bringing a reducing gas into contact with the electrode of the object to be tested under atmospheric pressure.