The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
May. 13, 2005
Tsuyoshi Moriya, Nirasaki, JP;
Hiroyuki Nakayama, Nirasaki, JP;
Kikuo Okuyama, Higashihiroshima, JP;
Manabu Shimada, Higashihiroshima, JP;
Tsuyoshi Moriya, Nirasaki, JP;
Hiroyuki Nakayama, Nirasaki, JP;
Kikuo Okuyama, Higashihiroshima, JP;
Manabu Shimada, Higashihiroshima, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate transfer mechanism for transferring a substrate includes a mounting table on which the substrate is mounted; an arm member connected to the mounting table and moving it. The substrate transfer mechanism further includes a temperature control unit for controlling temperature of the mounting table, wherein the temperature control unit forms a temperature gradient in the mounting table. The temperature control unit includes a detector for detecting temperature in an environment or a chamber in which the substrate transfer mechanism is installed a heater for heating the mounting table and a controller for controlling an operation of the heater based on the temperature in the environment or the chamber detected by the detector.