The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2010
Filed:
May. 23, 2007
Cornelis Henricus Van DE Vin, Eindhoven, NL;
Ralph Brinkhof, Eindhoven, NL;
Arthur Winfried Eduardus Minnaert, Veldhoven, NL;
Alex Van Zon, Waalre, NL;
Cornelis Henricus Van De Vin, Eindhoven, NL;
Ralph Brinkhof, Eindhoven, NL;
Arthur Winfried Eduardus Minnaert, Veldhoven, NL;
Alex Van Zon, Waalre, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method is provided for positioning at least one target portion of a substrate with respect to a focal plane of a projection system. The method comprises performing height measurements of at least part of the substrate to generate height data, using predetermined correction heights to compute corrected height data for the height data. The method further comprises positioning the target portion of the substrate with respect to the focal plane of the projection system at least partially based on the corrected height data.