The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2010
Filed:
Aug. 13, 2005
Abdurrahman Sezginer, Los Gatos, CA (US);
Roy Prasad, Los Gatos, CA (US);
Chi-song Horng, Palo Alto, CA (US);
Hsu-ting Huang, San Jose, CA (US);
Abdurrahman Sezginer, Los Gatos, CA (US);
Roy Prasad, Los Gatos, CA (US);
Chi-Song Horng, Palo Alto, CA (US);
Hsu-Ting Huang, San Jose, CA (US);
Cadence Design Systems, Inc., San Jose, CA (US);
Abstract
An apparatus and method of synthesizing a photolithographic data set includes using a first computational model to calculate a first figure-of-merit for the photolithographic data set; changing a first part of the photolithographic data set to increase the first figure-of-merit; and then using a second computational model to calculate a second figure-of-merit of the photolithographic data set; and changing a second part of the photolithographic data set to increase the second figure-of-merit. The second computational model enables figure-of-merit calculations to be executed at a significantly faster execution rate than the first computational model.