The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2010
Filed:
Jun. 05, 2008
Alexandra Pazidis, Essingen-Lautenburg, DE;
Stephan Six, Aalen, DE;
Ruediger Duesing, Neu-Ulm, DE;
Gennady Fedosenko, Aalen, DE;
Alexandra Pazidis, Essingen-Lautenburg, DE;
Stephan Six, Aalen, DE;
Ruediger Duesing, Neu-Ulm, DE;
Gennady Fedosenko, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An optical element () made of a material that is transparent to wavelengths in the UV region, which optical element () includes an oleophobic coating () outside of its optically free diameter whose disperse component of the surface energy is preferably 25 mN/m or less, particularly preferably 20 mN/m or less, in particular 15 mN/m or less. In addition or as an alternative, the optical element () within its optically free diameter comprises an oleophilic coating () that is transparent to wavelengths in the UV region, with the disperse component of the surface energy of this coating preferably being more than 25 mN/m, particularly preferably more than 30 mN/m, in particular more than 40 mN/m. The optical element may be provided in an arrangement in which it dips at least partially into an organic liquid.