The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2010
Filed:
Apr. 26, 2005
Katsumi Sato, Chuo-ku, JP;
Kazuo Inoue, Chuo-ku, JP;
Hitoshi Fujiyama, Chuo-ku, JP;
Mutsuhiko Yoshioka, Chuo-ku, JP;
Hisao Igarashi, Chuo-ku, JP;
Katsumi Sato, Chuo-ku, JP;
Kazuo Inoue, Chuo-ku, JP;
Hitoshi Fujiyama, Chuo-ku, JP;
Mutsuhiko Yoshioka, Chuo-ku, JP;
Hisao Igarashi, Chuo-ku, JP;
JSR Corporation, Tokyo, JP;
Abstract
A sheet-like probe and a method of producing the probe. In the probe electrode structure bodies do not come out from an insulation film and achieve high durability, and in a burn-in test for a wafer having a large area and for a circuit device having to-be-inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented for stable connection conditions. The sheet-like probe includes an insulation layer and a contact film provided with electrode structure bodies arranged on the insulation layer to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section exposed to the front surface of the insulation layer.