The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2010
Filed:
May. 16, 2007
Levinus Pieter Bakker, Helmond, NL;
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Johannes Maria Freriks, Veldhoven, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Jakob Vijfvinkel, Eindhoven, NL;
Wilhelmus Josephus Box, Eksel, BE;
Levinus Pieter Bakker, Helmond, NL;
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Johannes Maria Freriks, Veldhoven, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Jakob Vijfvinkel, Eindhoven, NL;
Wilhelmus Josephus Box, Eksel, BE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris from the radiation source. The contamination barrier includes a support structure, a plurality of plate members arranged on the support structure and extending in a radial direction from an axis of the support structure, and a shield configured to block at least part of the support structure from being hit by radiation or debris from the radiation source.