The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
Feb. 27, 2007
Applicants:
Chien-en Hsu, Hsinchu County, TW;
Chih-nan Liang, Changhua County, TW;
Po-sheng Lee, Hsinchu County, TW;
Inventors:
Chien-En Hsu, Hsinchu County, TW;
Chih-Nan Liang, Changhua County, TW;
Po-Sheng Lee, Hsinchu County, TW;
Assignee:
United Mircoelectronics Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wet cleaning process is provided. The wet cleaning process includes at least one first rinse process and a second rinse step. The first rinse step includes rinsing a substrate using deionized water containing CO, and then draining the water containing COto expose the substrate in an atmosphere of CO. The second rinse step includes rinsing the substrate using deionized water containing CO.