The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
Jan. 31, 2008
Steven Ross Codding, Underhill Center, VT (US);
Joseph R. Greco, South Burlington, VT (US);
Timothy Charles Krywanczyk, Essex Junction, VT (US);
Steven Ross Codding, Underhill Center, VT (US);
Joseph R. Greco, South Burlington, VT (US);
Timothy Charles Krywanczyk, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of recycling monitor wafers. The method includes: (a) providing a semiconductor wafer which includes a dopant layer extending from a top surface of the wafer into the wafer a distance less than a thickness of the wafer, the dopant layer containing dopant species; after (a), (b) attaching an adhesive tape to a bottom surface of the wafer; after (b), (c) removing the dopant layer; and after (c), (d) removing the adhesive tape.