The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
Apr. 18, 2006
Soo Young Choi, Fremont, CA (US);
Beom Soo Park, San Jose, CA (US);
Quanyuan Shang, Saratoga, CA (US);
Robert I. Greene, Fremont, CA (US);
John M. White, Hayward, CA (US);
Dong-kil Yim, Sungnam, KR;
Chung-hee Park, Seoul, KR;
Kam Law, Union City, CA (US);
Soo Young Choi, Fremont, CA (US);
Beom Soo Park, San Jose, CA (US);
Quanyuan Shang, Saratoga, CA (US);
Robert I. Greene, Fremont, CA (US);
John M. White, Hayward, CA (US);
Dong-Kil Yim, Sungnam, KR;
Chung-Hee Park, Seoul, KR;
Kam Law, Union City, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method for supporting a glass substrate comprising providing a substrate support having an aluminum body, a substrate contact area formed on the surface of the substrate support, wherein the process of forming the substrate contact area comprises forming an anodization layer on a surface region of the aluminum body, the coating having a thickness of between about 0.3 mils and about 2.16 mils, wherein the surface region substantially corresponds to the substrate contact area, and preparing the anodization layer disposed over the surface region to a surface roughness between about 88 micro-inches and about 230 micro-inches, followed by anodizing the substrate surface to said thickness, positioning the substrate support adjacent a substrate processing region in a substrate processing chamber, wherein the substrate contact area is adjacent the substrate processing region, positioning the glass substrate on the substrate contact area.