The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2010
Filed:
Nov. 08, 2006
Bin-ming Benjamin Tsai, Saratoga, CA (US);
Yung-ho Chuang, Cupertino, CA (US);
J. Joseph Armstrong, Milpitas, CA (US);
David Lee Brown, Sunnyvale, CA (US);
Bin-Ming Benjamin Tsai, Saratoga, CA (US);
Yung-Ho Chuang, Cupertino, CA (US);
J. Joseph Armstrong, Milpitas, CA (US);
David Lee Brown, Sunnyvale, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the illuminated portion of the specimen, analyzing the detected radiation for potential defects present in the specimen portion.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile