The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
May. 02, 2007
Wouter Anthon Soer, Nijmegen, NL;
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
Niels Machiel Driessen, Valkenswaard, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Johannes Christiaan Leonardus Franken, Knegsel, NL;
Olav Waldemar Vladimir Frijns, 's-Hertogenbosch, NL;
Derek Jan Wilfred Klunder, Geldrop, NL;
Wouter Anthon Soer, Nijmegen, NL;
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
Niels Machiel Driessen, Valkenswaard, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Johannes Christiaan Leonardus Franken, Knegsel, NL;
Olav Waldemar Vladimir Frijns, 's-Hertogenbosch, NL;
Derek Jan Wilfred Klunder, Geldrop, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A device is arranged to measure a quantity relating to radiation. The device includes a sensor configured to measure the quantity, a screen arranged to protect the sensor from incoming particles emitted from a source configured to emit extreme ultraviolet radiation, and a mirror configured to redirect extreme ultraviolet radiation emitted by the source, past the screen, to the sensor.