The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Jun. 06, 2008
Haruo Takahashi, Chiba, JP;
Yo Yamamoto, Chiba, JP;
Toshiaki Fujii, Chiba, JP;
SII NanoTechnology Inc., Chiba, JP;
Abstract
There is provided a method of arranging, as a composite charged-particle beam system, a gas ion beam apparatus, an FIB and an SEM in order to efficiently prepare a TEM sample. The composite charged-particle beam system includes an FIB lens-barrel, an SEM lens-barrel, a gas ion beam lens-barrel, and a rotary sample stagehaving an eucentric tilt mechanism and a rotating shaftorthogonal to an eucentric tilt axis. In the composite charged-particle beam system, an arrangement is made such that a focused ion beam, an electron beamand a gas ion beamintersect at a single point, an axis of the FIB lens-barreland an axis of the SEM lens barrelare orthogonal to the eucentric tilt axis, respectively, and the axis of the FIB lens-barrel, an axis of the gas ion beam lens-barreland the eucentric tilt axisare in one plane.