The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Nov. 08, 2007
Ejaj Ahmed, Chicago, IL (US);
Charles N. Archie, Granite Springs, NY (US);
Stephen W. Goodrich, South Burlington, VT (US);
Eric P. Solecky, Hyde Park, NY (US);
Georgios A. Vakas, Poughkeepsie, NY (US);
Erwin E. Weissmann, Southbury, CT (US);
Lin Zhou, LaGrangeville, NY (US);
Ejaj Ahmed, Chicago, IL (US);
Charles N. Archie, Granite Springs, NY (US);
Stephen W. Goodrich, South Burlington, VT (US);
Eric P. Solecky, Hyde Park, NY (US);
Georgios A. Vakas, Poughkeepsie, NY (US);
Erwin E. Weissmann, Southbury, CT (US);
Lin Zhou, LaGrangeville, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of preparing recipes of operating a metrology tool, wherein each recipe includes a set of instructions for measuring at least one dimension in a microelectronic feature. There is provided a desired recipe having instructions for measuring one or more desired dimensions, the desired recipe or portion thereof including a summary of parameters relating to metrology tool function with respect to the microelectronic feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in a database, identifying differences between the instructions in the desired recipe and the instructions in the database, modifying the instructions in the desired recipe to conform to the instructions in the database, verifying the desired recipe prior to using the modified desired recipe by the metrology tool, and using the desired recipe to execute a microelectronic feature measurement on the metrology tool.