The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Feb. 26, 2007
Applicants:
Mark A. Mccord, Los Gatos, CA (US);
Tom G. Miller, Portland, OR (US);
David L. Brown, Sunnyvale, CA (US);
Inventors:
Mark A. McCord, Los Gatos, CA (US);
Tom G. Miller, Portland, OR (US);
David L. Brown, Sunnyvale, CA (US);
Assignee:
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01T 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
One embodiment relates to a solid-state charged-particle detector. The detector includes a PIN diode and a conductive coating on the front-side of the PIN diode, wherein the front-side receives incident charged particles to be detected. In addition, the detector includes a metal layer on the backside of the PIN diode and electrical connections to the metal layer and to the conductive coating. Other embodiment are also disclosed.