The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
May. 16, 2008
Tomonori Nakano, Kokubunji, JP;
Takeshi Kawasaki, Musashino, JP;
Kotoko Hirose, Abiko, JP;
Makoto Ezumi, Mito, JP;
Tomonori Nakano, Kokubunji, JP;
Takeshi Kawasaki, Musashino, JP;
Kotoko Hirose, Abiko, JP;
Makoto Ezumi, Mito, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A charged particle beam apparatus includes: a correction image acquisition partfor making a detectoracquire items of two-dimensional image data at different focal positions; a directional differentiation operation partfor obtaining directional derivative values in a plurality of directions for each of the items of two-dimensional image data at different focal positions; an aberration parameter calculation partfor obtaining aberration parameters according to previously determined methods by using the directional derivative values in a plurality of directions for each of the items of two-dimensional image data; an aberration correction value calculation partfor obtaining correction values for aberrations by using the aberration parameters; and a control partfor setting the correction values in a correction optical system control means to make an aberration correctorcorrect the aberrations.