The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Nov. 30, 2006
Everhardus Cornelis Mos, Best, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Maurits Van Der Schaar, Eindhoven, NL;
Thomas Leo Maria Hoogenboom, Breda, NL;
Everhardus Cornelis Mos, Best, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Maurits Van Der Schaar, Eindhoven, NL;
Thomas Leo Maria Hoogenboom, Breda, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A fault detection and classification method is disclosed that uses raw back-focal-plane image data of radiation from a substrate surface, detected by a scatterometer detector, to determine a variation in the raw data and correlate the variation in the raw data with a possible fault in a lithographic apparatus or a process that patterned the substrate surface. The correlation is carried out by comparing the variation in the raw data with known metrology data. Once a fault has been determined, a user may be notified of the fault.