The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 04, 2010

Filed:

Oct. 15, 2007
Applicants:

Hyeong Chan JO, Suwon, KR;

Hong Jae Lim, Suwon, KR;

Seung Jun Shin, Seoul, KR;

Joon Hui Kim, Seoul, KR;

Yong Seok Kim, Seoul, KR;

Sang-il Park, Seongnam, KR;

Inventors:

Hyeong Chan Jo, Suwon, KR;

Hong Jae Lim, Suwon, KR;

Seung Jun Shin, Seoul, KR;

Joon Hui Kim, Seoul, KR;

Yong Seok Kim, Seoul, KR;

Sang-il Park, Seongnam, KR;

Assignee:

Park Systems Corp., Suwon, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/00 (2006.01); G21K 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.


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