The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Mar. 19, 2007
Applicants:
Hidenori Miyoshi, Nirasaki, JP;
Kenji Ishikawa, Kawasaki, JP;
Yukio Takigawa, Kawasaki, JP;
Yoshihiro Nakata, Kawasaki, JP;
Hideki Tateishi, Tokyo, JP;
Inventors:
Hidenori Miyoshi, Nirasaki, JP;
Kenji Ishikawa, Kawasaki, JP;
Yukio Takigawa, Kawasaki, JP;
Yoshihiro Nakata, Kawasaki, JP;
Hideki Tateishi, Tokyo, JP;
Assignees:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for processing a substrate having an insulation film and a metal layer thereon comprises the steps of supplying a carboxylic acid anhydride to the substrate, and heating the substrate during the step of supplying the carboxylic acid anhydride to the substrate.