The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Jan. 29, 2008
Yasuko Aoki, Hitachi, JP;
Tetsuya Sawahata, Hitachinaka, JP;
Mine Araki, Hitachinaka, JP;
Atsushi Muto, Hitachinaka, JP;
Shuichi Takeuchi, Hitachinaka, JP;
Yasuko Aoki, Hitachi, JP;
Tetsuya Sawahata, Hitachinaka, JP;
Mine Araki, Hitachinaka, JP;
Atsushi Muto, Hitachinaka, JP;
Shuichi Takeuchi, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.