The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
May. 25, 2004
Applicants:
Tadaaki Kaneko, Sanda, JP;
Kiyoshi Sakaue, Takarazuka, JP;
Naokatsu Sano, Sanda, JP;
Inventors:
Assignee:
Riber SA, Rueil-Malmaison, FR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/36 (2006.01);
U.S. Cl.
CPC ...
Abstract
Onto a surface of an AlGaInAsP(0≦x, y, z≦1) layer including GaAs alone or an InP substrate, an electron beam controlled to an arbitrary electron beam diameter and current density is irradiated so as to selectively substitute or generate GaOfor a natural oxide layer formed on the AlGaInAsP, layer surface, then the AlGaInAsPlayer surface is dry-etched by a bromide in single atomic layer units, whereby the natural oxide layer other than the part substituted by the GaOand AlGaInAsPsubstrate are removed.