The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Jul. 11, 2005
Mark Harless, Plymouth, MN (US);
Cory Watkins, Eden Prairie, MN (US);
Pat Simpkins, Edina, MN (US);
Kevin Barr, Inver Grove Heights, MN (US);
Mark Harless, Plymouth, MN (US);
Cory Watkins, Eden Prairie, MN (US);
Pat Simpkins, Edina, MN (US);
Kevin Barr, Inver Grove Heights, MN (US);
Rudolph Technologies, Inc., Flanders, NJ (US);
Abstract
A wafer holding mechanism for holding a wafer of the type used in the manufacture of semiconductor devices is herein described. The mechanism has a first plate having a number of offsets that define at least one lip that extends radially inward of the offsets. A second plate is positioned adjacent the first plate and generally between the first plate and the lip such that one or more fingers coupled to the second plate oppose the lip that depends from the first plate. When the second plate is moved to a closed position, the at least one lip and the one or more fingers cooperatively grasp an edge of a wafer therebetween. The wafer holding mechanism is coupled to a drive that rotates the wafer before an imaging mechanism for capturing images of the wafer as it rotates.