The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2010
Filed:
Jul. 26, 2007
Applicants:
Hideki Ito, Numazu, JP;
Shinichi Mitani, Numazu, JP;
Hironobu Hirata, Mishima, JP;
Inventors:
Assignee:
NuFlare Technology, Inc., Numazu-shi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F27B 5/16 (2006.01);
U.S. Cl.
CPC ...
Abstract
A manufacturing apparatus for a semiconductor includes a reaction chamber into which a wafer is introduced, gas supply unit for supplying a gas to the reaction chamber, gas exhaust unit for exhausting the gas from the reaction chamber, a holder for holding the wafer at an outer circumferential part of the wafer, a first heater for heating the wafer from below, a reflector provided above the holder, and a drive mechanism for driving the reflector.