The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2010
Filed:
Aug. 01, 2005
Matthew A. Purdy, Austin, TX (US);
Matthew Ryskoski, Kyle, TX (US);
Richard J. Markle, Austin, TX (US);
Matthew A. Purdy, Austin, TX (US);
Matthew Ryskoski, Kyle, TX (US);
Richard J. Markle, Austin, TX (US);
GlobalFoundries, Inc., Grand Cayman, KY;
Abstract
The present invention provides a method and apparatus for modifying process selectivities based on process state information. The method includes accessing process state information associated with at least one material removal process, determining at least one selectivity based on the process state information, and modifying at least one process parameter of said material removal process based on said at least one determined selectivity.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile