The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Feb. 21, 2007
Hernes Jacobs, Rossum, NL;
Erik Roelof Loopstra, Heeze, NL;
Michel Riepen, Veldhoven, NL;
Eva Mondt, Eindhoven, NL;
Hernes Jacobs, Rossum, NL;
Erik Roelof Loopstra, Heeze, NL;
Michel Riepen, Veldhoven, NL;
Eva Mondt, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of removing liquid from a substrate supported on a substrate table and from a gap between the substrate and the substrate table includes: providing a liquid removal device with at least one outlet connected to an under pressure source, the outlet forming an elongated extractor of a predetermined geometry; relatively moving the substrate table and the liquid removal device such that the extractor is adapted to pass over all of the substrate and gap and such that substantially at any given time any local part of the extractor at the edge of a non-dried portion of the gap has, in a plane, its local tangent orientated at an angle of between about 35° and 90° to the local tangent of the gap.